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Sematech (Organization)
 
1. Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California
ISBN: 9780819427762 - Paperback - List Price: $130.00
Publisher: Society of Photo Optical - Published Date: 06/01/1998 - Paperback
Author: Society of Photo-Optical Instrumentation Engineers
Author: Semiconductor Equipment and Materials International
Author: Sematech (Organization)
Editor: Yuli Vladimirsky

2. Optical Microlithography IX: Proceedings 13-15 March 1996 Santa Clara, California
ISBN: 9780819421029 - Paperback - List Price: $126.00
Publisher: Society of Photo Optical - Published Date: 06/01/1996 - Paperback
Author: Society of Photo-Optical Instrumentation Engineers
Author: Semiconductor Equipment and Materials International
Author: Sematech (Organization)
Editor: Gene E. Fuller

3. Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California
ISBN: 9780819427793 - Paperback - List Price: $160.00
Publisher: Society of Photo Optical - Published Date: 06/01/1998 - Paperback
Author: Semiconductor Equipment and Materials International
Author: Society of Photo-Optical Instrumentation Engineers
Author: Sematech (Organization)
Editor: Luc Van Den Hove
Editor: Luc Van Den Hove


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