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Fred Lakhani
1.
Metrology-based Control for Micro-manufacturing
Author:
Society of Photo-Optical Instrumentation Engineers
-
Author:
Fred Lakhani
ISBN:
0819439533
ISBN13:
9780819439536
Binding:
Paperback
List Price:
$70.0
Publisher:
Society of Photo Optical
Published Date:
06/05/2001
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