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Steve Wittekoek
1. Optical Microlithography and Metrology for Microcircuit Fabrication: 27-28 April, 1989, Paris, France
ISBN: 9780819401748 - Paperback - List Price: $56.00
Publisher: Society of Photo Optical - Published Date: 09/01/1989 - Paperback
Author: Michel J. Lacombat
Author: Steve Wittekoek
Author: European Physical Society
Author: European Federation for Applied Optics
Author: Society of Photo-Optical Instrumentation Engineers

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