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Advanced Semiconductor Mft Conference Workshop
by IEEE ; Mass) SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th : 1997 : Cambridge
Binding: Paperback, 472 pages
Publisher: Institute of Electrical & Electronics Enginee
List Price: USD $145.00
ISBN 10: 0780340507
ISBN 13: 9780780340503
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Book Description:
A collection of papers in advanced semiconductor manufacturing focusing on topics such as: strategies for process and yield monitoring; simulation and application; effectively managing and modelling yield; equipment efficiency and productivity; defect detection; and inventory control techniques.


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