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1998 International Conference on Microelectronic Test Structure, Icmts
by Japan) IEEE International Conference on Microelectronic Test Structures (1998 : Kanazawa-shi
Binding: Paperback, 272 pages
Publisher: Institute of Electrical & Electronics Enginee
List Price: USD $122.00
ISBN 10: 0780343484
ISBN 13: 9780780343481
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Book Description:
The papers from this international conference cover advances in developments and future directions on all microelectronic test structures and their applications for characterization of device matching, critical dimension, parameter extraction, yield reliability, and interconnection.

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