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Microelectromechanical Systems, 1998 IEEE 11th International Workshop
by Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg ; IEEE
Binding: Paperback, illustrated edition edition, 750 pages
Publisher: Institute of Electrical & Electronics Enginee
List Price: USD $172.00
ISBN 10: 078034412X
ISBN 13: 9780780344129
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Book Description:
MEMS 98 is the first international forum focused on interdisciplinary research topics on design, modeling, fabrication, operation, and applications of microelectromechanical devices, machines, and systems constructed on the micrometer to millimeter scale. ' 'Fabrication Technologies; Experimental Evaluation; Materials; Assembly and Packaging; Theory and Simulation; Design Tools; Actuators; Sensors; Systems; Optics; Fluidics; Data Storage; Medical Engineering; Industrial Applications' 'Electromagnetics

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