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2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Boston, Massachusetts, Usa, April 30-May 2, 2002
by IEEE
Binding: Paperback, 440 pages
Publisher: Ieee
List Price: USD $178.00
Weight: 230
Dimension: H: 1.25 x L: 10.75 x W: 8.5 inches
ISBN 10: 0780371585
ISBN 13: 9780780371583
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Book Description:
This text originated from the 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop, and examines the manufacture of circuits and devices. Topics covered include: advanced meteorology; cost reduction; MEMS technology; time to market; and factory automation.

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