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Plasma & Process-Induced Damage, 2001: 6th International Symposium (IEEE Conference Proceedings)
by Calif)) International Symposium on Plasma Process-Induced Damage (6th : 2001 : Monterey
Binding: Paperback, 128 pages
Publisher: Northern California Chapter of the American V
List Price: USD $140.00
Weight: 75
Dimension: H: 0.5 x L: 10.5 x W: 8.25 inches
ISBN 10: 096515775X
ISBN 13: 9780965157759
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Book Description:
This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non volatile memories; ultra thin dielectrics; contamination; and multi terminal effects.

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