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Optical Microlithography IX: Proceedings : 13-15 March 1996 Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 2726.)
by Sematech (Organization)
Binding: Paperback, 926 pages
Publisher: Society of Photo Optical
Weight: 4.75 pound
Dimension: H: 2 x L: 11 x W: 8.75 inches
ISBN 10: 0819421022
ISBN 13: 9780819421029
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