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Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California (Proceedings of Spie, Volume 3331)
by Sematech (Organization)
Binding: Paperback, 702 pages
Publisher: SPIE-International Society for Optical Engine
Weight: 3.57 pound
Dimension: H: 0.75 x L: 10.63 x W: 0.53 inches
ISBN 10: 0819427764
ISBN 13: 9780819427762
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