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Emerging Lithographic Technologies III: 15-17 March, 1999, Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3676.)
Binding: Paperback, 864 pages
Publisher: Society of Photo Optical
Weight: 4.45 pound
Dimension: H: 1.75 x L: 10.25 x W: 8.25 inches
ISBN 10: 0819431508
ISBN 13: 9780819431509
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