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Multilevel Interconnect Technology III: 22-23 September 1999, Santa Clara, California (Proceedings of Spie--the International Society for Optical Engineering, V. 3883.)
Binding: Paperback, 184 pages
Publisher: Society of Photo Optical
Weight: 0.95 pound
Dimension: H: 0.5 x L: 10.6 x W: 8.3 inches
ISBN 10: 0819434809
ISBN 13: 9780819434807
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